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Semiconductor RF Power & Process Control Bulk Surplus Lot MKS Instruments • Advanced Energy • Sierra Instruments • Unit Instruments
Comprehensive bulk acquisition lot featuring legacy semiconductor manufacturing equipment components, RF power parts, process and vacuum control modules, and mass flow controllers. Ideal for equipment resellers, RF power specialists, process-tool rebuilders, and independent service organizations looking for hard-to-find spares and repair modules.
Important Note on Photos:Please note that individual close-up photos of every single part included in this lot are not shown. You are purchasing the complete consolidated package as described and listed below.
Shipping & Returns:
Included Inventory Manifest:
MKS Process / Vacuum Control:
MKS 250B-1-A Pressure/Flow Self Contained PID Gas Inlet Control Module, 115V (Used)
MKS 252A-1 Exhaust Valve Controller (For parts or not working)
MKS Baratron 170M-6C Range Multiplier (Used)
MKS Instruments Type 252C-1-SP034-85 Exhaust Valve Controller (For parts or not working)
MKS Type 270B-4 Signal Conditioner / Display (Used)
MKS LP2-40-AK-CLVS Vacuum Isolation Valve, 323827 (Used)
Advanced Energy / RF Power parts
Advanced Energy PCB AE 1345035 / 5035-C9126H085 (Used)
Advanced Energy PCB AE 1345055 / 5055-L9126H087 Main CPU PCB (Used)
Advanced Energy PCB AE 1345054 / 5054-P921300 (Used)
Advanced Energy RFX 2500 Front Panel with 5032/G9116H060 PCB (Used)
Advanced Energy PCB AE 1345042 / 5042-19126H084 Power Supply PCB (Used)
Advanced Energy AE 5081/E9126H093 / 5035/D9126H083 RF PCB Assembly (Used)
Advanced Energy AE 5031/D9126H079 / 5033/E9126H081 RF PCB Assembly (Used)
Advanced Energy PCB AE 1345034 / 5034/891 Power Cooling PCB 26H082 (Used)
Airpax UPG111-1-61-203-09 Switch, 20 Amp, 250V, Advanced Energy related (Used)
Advanced Energy 5067/E9127T053 RFX 2500 Power Supply Assembly, 30550493D (Used)
Advanced Energy RFX Spare Parts Lot (Used)
Gas Delivery / Mass Flow:
Sierra Instruments W-478-D CL2, 0-100 SCCM Side-Trak III MFC (Used)
Sierra Instruments 741-1-01, 0-25 SCFM Single-Channel Mass Flow Controller (Used)
Unit UFC-1000 Mass Flow Controller, C2F6, 200 SCCM, 1/4" MVCR (As Is)
Unit UFC-1200A Mass Flow Controller, N2, 10 SLM, 1/4" Male (Used)
Package Notes: Components are offered as a consolidated inventory acquisition package; individual compatibility between components is not implied. Condition is shown based on the current inventory listing. Package is intended for knowledgeable equipment resellers, rebuilders, and technical buyers who can evaluate suitability and compatibility. Seller may consider reasonable offers and can provide additional photos or item details upon request.
Thanks for looking and happy offerding!

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